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Foundations of MEMS by Chang Liu: A Review
Microelectromechanical systems (MEMS) are devices that combine electrical and mechanical components at the microscale. They have applications in various fields such as sensors, actuators, biomedical devices, optical systems, and wireless communication. MEMS are challenging to design, fabricate, and test due to their multidisciplinary nature and the limitations of microfabrication technology.
Foundations of MEMS by Chang Liu is an entry-level textbook that aims to systematically teach the fundamentals of MEMS to an interdisciplinary audience. The book covers the basic concepts, designs, materials, and fabrication issues related to the MEMS field by employing examples from both the electrical and mechanical engineering domains. The book also incorporates the latest developments and trends in MEMS technology such as nanoscale MEMS, bioMEMS, optical MEMS, RF MEMS, and power MEMS.
The book is organized into 12 chapters that cover the following topics:
Chapter 1: Introduction. This chapter provides a historical overview of the development of MEMS, the intrinsic characteristics of MEMS devices, and the classification of sensors and actuators based on energy domains and transduction mechanisms.
Chapter 2: Microfabrication. This chapter introduces the basic principles and processes of microfabrication such as photolithography, etching, deposition, doping, bonding, and packaging.
Chapter 3: Mechanics of Materials. This chapter reviews the essential concepts of mechanics of materials such as stress, strain, elasticity, plasticity, fracture, fatigue, and creep.
Chapter 4: Mechanics of Beams. This chapter applies the mechanics of materials to analyze the deformation and stress of beams under various loading conditions such as bending, torsion, shear, axial force, and thermal stress.
Chapter 5: Electrostatics. This chapter explains the electrostatic phenomena and equations that govern the behavior of capacitive sensors and actuators such as parallel-plate capacitors, comb-drive actuators, electrostatic motors, and electrostatic switches.
Chapter 6: Piezoresistivity. This chapter describes the piezoresistive effect that relates the change in electrical resistance to the applied mechanical stress or strain. The chapter also discusses the applications of piezoresistive sensors such as strain gauges, pressure sensors, accelerometers, and force sensors.
Chapter 7: Piezoelectricity. This chapter introduces the piezoelectric effect that relates the generation of electric charge or voltage to the applied mechanical stress or strain. The chapter also covers the applications of piezoelectric sensors and actuators such as microphones, speakers, ultrasonic transducers, resonators, and energy harvesters.
Chapter 8: Thermal Effects. This chapter examines the thermal phenomena and effects that influence the performance and reliability of MEMS devices such as heat transfer, thermal expansion, thermal stress, thermoelectricity, thermocouples, thermistors, bolometers, and thermally actuated devices.
Chapter 9: Fluid Mechanics. This chapter explores the fluid mechanics principles and equations that govern the flow and pressure of fluids in microchannels and microvalves. The chapter also covers the applications of fluidic sensors and actuators such as flow meters, pressure sensors, a474f39169